1.
Local
Structural Phase Determination of Ni Silicide Thin-Films Using EXAFS M. A.
Sahiner, P. Y. Hung, W-Y. Loh, P. S. Lysaght, D. Guerrero, J. C. Woicik
Physica Status Solidi C 9,
2184-2188 (2012).
2.
Spectroscopic Analysis of Al and N Diffusion in HfO2 P. S.
Lysaght, J. C. Woicik, M. A. Sahiner, J. Price, C. Weiland, and P. D.
Kirsch, Journal of Applied Physics
112, 064118 (2012).
3.
Formation
Of Arsenic Rich Silicon Oxide Under Plasma Immersion Ion Implantation And
Laser Annealing F. Meirer, E. Demenev, D. Giubertoni, S. Gennaro, L.
Vanzetti, G. Pepponi, M. Bersani, M. A. Sahiner, M. A. Foad, J. C. Woicik,
A. Mehta, P. Pianetta, American Institute of Physics Proceedings In Ion
Implantation Technology 1496, 183
(2012).
4.
Local Structural Modifications of the HfO2
layer in the Al2O3 Capped High-k Dielectric Films as Probed by EXAFS, M. A.
Sahiner, P. S. Lysaght, J. C. Woicik, C. S. Park, J. Huang, G. Bersuker, W.
Taylor, P. D. Kirsch, and R. Jammy, Phys. Status Solidi A 209, No. 4,
679-682 (2012).
5.
Deactivation
of sub-melt laser annealed arsenic ultra-shallow junctions in silicon during
subsequent thermal treatment, D. Giubertoni, G. Pepponi, M.A. Sahiner, S. P.
Kelty, S. Gennaro, M. Bersani, M. Kah, K.J. Kirkby, R. Doherty, M.A. Foad,
F. Meirer, C. Streli, J.C. Woicik, and P. Pianetta, J. Vac. Sci. Technol. B
28 (1) C1B1-5, (2010).
6.
Synchrotron XPS and EXAFS Identification of
Chemical State and Crystal Phase Changes of HfO2 Films Doped with Si, N, Al,
and La, P Lysaght, J Woicik, M Sahiner, P Kirsch, G Bersuker, B Lee, R
Jammy, VLSl Technology, Systems and Applications, VLSI-TSA 82, IEEE (2010).
7.
Characterization of Junction Activation and
Deactivation Using non-Equilibrium Annealing: Solid Phase Epitaxy, Spike
Annealing, Laser Annealing M. Bersani, G. Pepponi, D. Giubertoni, S.
Gennaro, M. A. Sahiner, S. P. Kelty, M. Kah, K. J. Kirkby, R. Doherty, M. A.
Foad, F. Meirer, C. Streli, J. C. Woicik and P. Pianetta, IEEE Proceedings
on The 9th International Workshop on Junction Technology p64-68 (2009).
8.
Local Crystal Structure Modifications in
Pulsed Laser Deposited Colossal Magnetoresistive Oxide Thin Films, M. Alper
Sahiner, Wiqar Shah, Marc Aranguren, Jeffrey Serfass, Joseph C. Woicik,
Mater. Res. Soc. Symp. Proc. 1118, K05-08, (2009).
9.
Local Crystal
Structural Modifications in Pulsed Laser Deposited High-k Dielectric Thin
Films on Silicon and Germanium, M. Alper Sahiner, Joseph C. Woicik, Timothy
Kurp, Jeffrey Serfass, Marc Aranguren
Materials Science in Semiconductor Processing, 11, 245 (2008).
10.
Correlation of local structure and
electrical activation in arsenic ultra shallow junctions in silicon, D.
Giubertoni, G. Pepponi, S. Gennaro, and M. Bersani, M. A. Sahiner, S. P.
Kelty, R. Doherty, M. A. Foad, M. Kah, K. J. Kirkby, J. C. Woicik, P.
Pianetta, Journal of Applied Physics, 104, 103716 (2008).
11.
Incipient amorphous-to-crystalline
transition in HfO2 as a function of thickness scaling and anneal
temperature, P. S. Lysaght, Joseph C. Woicik, M. A. Sahiner, S. C. Song, B
-H. Lee and R. Jammy, Journal of Non-crystalline Solids 354, 399 (2008).
12.
Physical Characteristics of HfO2 Dielectrics
at the Physical Scaling Limit, P Lysaght, J Woicik, M Sahiner, P Kirsch, G
Bersuker, B Lee, R Jammy, VLSl Technology, Systems and Applications,
VLSI-TSA 156, IEEE (2008).
13.
Characterizing crystalline polymorph
transitions in HfO2 by extended x-ray absorption fine-structure
spectroscopy,
Patrick Lysaght, Joseph
Woicik, M.
Alper Sahiner, Byoung-Hun Lee, Raj Jammy, Applied
Physics Letters, 91, 122910 (2007).
14.
Pulsed Laser
Deposition and Characterization of Hf Based High-k Dielectric Thin Films,
M.
Alper Sahiner,
J. C. Woicik, P. Gao, P. McKeown, M. C. Croft, M. Gartman, B.
Benapfl, Thin Solid Films (Elsevier)
515, 6548 (2007).
15.
Implantation and Activation of High Concentrations of Phosphorus and Boron
in Germanium, Yong Seok Suh, M. S. Carroll, R. A. Levy, G. Bisognin, D. De
Salvador and M. A. Sahiner, MRS Proceedings
891, EE 7.20.1 (2006).
16.
Implantation and Activation of High Concentrations of Boron in Germanium
Y.S. Suh, M. S. Carroll, R. A. Levy, M. A. Sahiner, G. Bisognin, and C. A.
King, IEEE Transactions on Electron Devices
52, 2416-2421 (2005).
17.
The
Local Structural Characterization of the Inactive Clusters in B, BF2
and BF3 Implanted Si Wafers Using X-ray Techniques,
M. Alper Sahiner, Daniel F. Downey, Steven W. Novak, Joseph C. Woicik, Dario
A. Arena, Microelectronics Journal (Elsevier), 36, 522-526 (2005).
18.
Modeling
of Boron and Phosphorus Implantation into (100) Germanium, Y.S. Suh, M. S.
Carroll, R. A. Levy, M. A. Sahiner, G. Bisognin, and C. A. King, IEEE
Transactions on Electron Devices 52,
91 (2005).
19.
Clustering Analysis In Boron And Phosphorus Implanted (100) Germanium By
X-Ray Absorption Spectroscopy, M. Alper Sahiner, Parviz Ansari, Malcolm S.
Carroll, C. A. King, Y. S. Suh, R. A. Levy,
Temel Buyuklimanli, Mark Croft
MRS Proceedings 864, E7.8.1-5 (2005).
20.
XAFS as a
Direct Local Structural Probe in Revealing the Effects of C Presence in B
Diffusion in SiGe Layers, M. Alper Sahiner, Parviz Ansari, Malcolm S.
Carroll, Charles W. Magee, Steven W. Novak, Joseph C. Woicik, MRS
Proceedings 810, C11.10.1 (2004)
21.
The role
of Ge in cluster formation in B and BF2 implanted Si wafers after
Ge pre-amorphization, M. Alper Sahiner, Charles W. Magee, Daniel F. Downey,
Edwin Arevalo, Joseph C. Woicik, MRS Proceedings 792, R7.3.1 (2004).
22.
Phosphorus and Boron Implantation into (100) Germanium, Y. S. Suh, M. S.
Carroll, R. A. Levy, A. Sahiner and C. A. King, MRS Proceedings 809,
B8.11.1 (2004).
23.
The
Local Structure of Antimony in High Dose Antimony Implants in Silicon by
XAFS and SIMS, M. A. Sahiner, S. W. Novak, J. C. Woicik, Y. Takamura, P. B.
Griffin, J. D. Plummer, MRS Proceedings 717, C3.6.1 (2003).
24.
Non-routine Dopant, Impurity, and Stoichiometry Characterization of SiGe,
SiON, and Ultra-low Energy B-implanted Si Using Secondary Ion Mass
Spectrometry, C. W. Magee, T. H. Buyuklimanli, J. W. Marino, S. W. Novak, M.
A. Sahiner, MRS Proceedings 717, C61.1 (2002).
25.
Determining the Ratio of the Precipitated versus Substituted Arsenic by
XAFS and SIMS in Heavy Dose Arsenic Implants in Silicon, M. A. Sahiner, S.
W. Novak, J. Woicik, J. Liu, V. Krishnamoorthy, MRS Proceedings 669,
J5.8.1 (2001).
26.
Arsenic
Clustering and Precipitation Analysis in Ion-Implanted Si Wafers by X-ray
Absorption spectroscopy and SIMS, M. A. Sahiner, S. W. Novak, J. Woicik, J.
Liu, V. Krishnamoorthy, IEEE Transactions
Ion Implantation Technology-2000,
Vol 00EX432, 600
(2000).
27.
Two-Dimensional Small Angle Scattering from Submonolayer Islands, A.
Sahiner, P. F. Miceli, C. Botez, W.C. Elliott, and P. W. Stephens, Advances
in X-ray Analysis 43, 169 (2000).
28.
Pressure-induced Bond Buckling in YBa2Cu3O7-d,
A. Sahiner, D. Crozier, D. T. Jiang, and R. Ingalls, Phys. Rev. B
59, 3902 (1999).
29.
The
Effects of Thermal Shocking on the Residual Stress in Si3N4
Ceramic Composites, A. Sahiner, D. Wittmer, and M. Sweeney, Nuclear
Instruments and Methods in Physics Research B
133, 73 (1997).
30.
Electronic Structure Anisotropy and d-Configuration in Ni-Based Materials,
A. Sahiner, M. Croft, S. Guha, Z. Zhang, M. Greenblatt, I. Perez, P. A.
Metcalf, H. Jahns, G. Liang, Phys. Rev. B
53, 9745 (1996).
31.
Polarized XAS Studies of Ternary Nickel Oxides, A. Sahiner, M. Croft, S.
Guha, I. Perez, Z. Zhang, M. Greenblatt, P. A. Metcalf, H. Jahns, G. Liang,
Phys. Rev. B 51 , 5879 (1995).
32.
XANES
Study of Hydrogen Incorporation in a Pd-capped Thin Film, M. W. Ruckman, G.
Reisfeld, N. M. Jisrawi, M. Weinert, M. Strongin, H. Wiesmann, M. Croft, A.
Sahiner, D. Sills, P. Ansari, Phys. Rev. B
57, 3881 (1998).
33.
Fe-fcc
Layer Stabilization in [111]-Textured Fe/Pt Multilayers, M. Croft, D.
Sills, A. Sahiner,A. F. Jankowski, P. H. Ansari, E. Kemly , F. Lu, Y. Jeon,
T. Tsakalakos, Nanostruct. Mat. 9, 413 (1997).
34.
Ruddlesden-Popper Zirconium Sulfides--a novel preparation method and
characterization of electronic structure, J. Yan, M. Greenblatt, A.
Sahiner, D. Sills, M. Croft, Journal of Alloys and Compounds
229, 216 (1995).
35.
X-Ray
Absorption Studies of Electron Doping and Band Shifts in Re2-x CexCuO4
(R=Pr, Nd, Sm, Eu, Gd), G. Liang, Y. Guo, W. Xu, W. Li, D. Badresingh, M.
Croft, J. Chen, A. Sahiner, Beam-hoan O, J. T. Markert, Phys. Rev. B
51, 1258 (1995).
36.
Origin
of Polychromism of
{Cis} Square-Planar Platinum(II) Complexes: Comparison
of Two Forms of Pt(2,2-bpy)(Cl)2, R. H. Herber, M. Croft, M. J. Coyer, B.
Bilash, A. Sahiner, Inorganic Chemistry
33, 2422 (1994).
37.
X-Ray
Absorption Near Edge Structure of IBi2Sr2CaCu2Oy,
G.Liang, A. Sahiner, M. Croft, J. Chen, J. Peng, X.-D. Xiang, A. Zettle, F.
Lu, Phys. Rev. B 47, 1029 (1993).